Other than Chuck-N-Cheese at Waldorf, here's what I found on the 'net.
Port Discovery features three floors of interactive fun for the entire family. Hands-on activities and adventures like Sensation Station, R&D Dream Works, and KidsWorks (urban treehouse). There's even a mini version of KidWorks made especially for toddlers. Call (410) 727-8120 for birthday party packages.
http://www.portdiscovery.org/generalinfo/visitor.html
Little Gym
22237 Shaw Road, Sterling, VA (703) 404-8543
A birthday at The Little Gym includes one hour of age-appropriate games, obstacle courses, gymnastics and other fun activities conducted by a trained Little Gym instructor. Recommended for ages 1-12. Call (703) 404-8543 for party times, prices and other info.
Kid Zone
White Flint Mall, North Bethesda, MD (301) 231-0505
11528 Middlebrook Road, Germantown, MD (301) 540-2424
At the Kid Zone (formerly Discovery Zone), kids can jump, swing, bounce, and most importantly have fun! A variety of party packages and a la carte party items are available.
Jeepers
6000 Greenbelt Road, Greenbelt, MD (301) 982-2444
700 Hungerford Drive, Rockville, MD (301) 340-3308
Bring your party animals to the jungle!!! Jeepers, an indoor amusement park and arcade designed for children ages two to twelve, offers three fun-filled packages. All parties include unlimited rides and soft play, cake, soft drinks and more.
http://www.jeepers.com/